Course Objectives: To understand the concepts of working of Microsensors and actuators, to enable selection, design and configuration of Microsensors and actuators


Over View of Mems and Microsystems: Definition – historical development, fundamental properties, micro fluidics, design and fabrication microsystem, microelectronics, working principle and applications of micro system.

Materials, Fabrication Processes and Micro System Packaging: Substrates and wafers, silicon as substrate material, mechanical properties of Si, Silicon Compounds silicon piezo resistors, Gallium arsenide, quartz, polymers for MEMS, conductive polymers. Photolithography, photo resist applications, light sources in implantation, diffusion process oxidation – thermal oxidation, silicon diode, chemical vapour deposition, sputtering deposition by epitoxy–etching – bulk and surface machining – LIGA process Micro system packaging – considerations packaging – levels of micro system packaging die level, device level and system level.


MicroSensors and MicroActuators: Electrostatic sensors, Parallel plate capacitors, Applications, Interdigitated Finger capacitor, Comb drive devices. Thermal Sensing and Actuation, Thermal expansion, Thermal resistors Applications, Magnetic Actuators, Micromagnetic components.


Case studies of MEMS in magnetic actuators: Piezoresistive sensors – Piezoresistive sensor materials, Stress analysis of mechanical elements, Applications to Inertia, Pressure, Tactile and Flow sensors. Piezoelectric sensors and actuators piezoelectric materials, Applications to Inertia, Acoustic, Tactile and Flow sensors. Microactuator examples, microvalves, micropumps, micromotors Microactuator systems:  InkJet printer heads, Micromirror TV Projector.


BioMEMS: Introduction to Bio MEMS, Cell Electrophysiology, Silicon Microfabrication, Microfluidics and BioMEMS applications, MEMS for Drug delivery.


Communication standard: IEEE P1451 standard WG


Minor Project:

Review of latest micro sensors for medical diagnosis and industrial measurements.


Course Learning Outcomes (CLO):

After the completion of the course the students will be able to 

1.      Design MEMS system.

2.      Handle Magnetic MEMS for process applications.

3.      Use BioMEMS for process measurements.



Recommended Books:

1.      Gardner, J. W., Microsensors, Principles and Applications, John Wiley (2008).

2.      Gregory T. Korvacs, Micromachined Transducer sourcebook, McGraw Hill (1998).

3.      Turner, A.P.F., and Wilson, G.S., Biosensors, Fundamentals and applications, Oxford University Press (2005).

4.      William T., Micromechanics and MEMS, IEEE Press (1997).

5.      Tai – Ran Hsu, MEMS and Microsystems Design and Manufacture, TataMcGraw
Hill, New Delhi (2002).