Course Objectives: To understand the concepts of working of Micro-sensors and actuators, to enable selection, design and configuration of Micro-sensors and actuators

Over View of Mems and Microsystems : Definition – historical development, fundamental properties, micro fluidics, design and fabrication micro-system, microelectronics, working principle and applications of micro system.

Materials, Fabrication Processes and Micro System Packaging: Substrates and wafers, silicon as substrate material, mechanical properties of Si, Silicon Compounds silicon piezo resistors, Gallium arsenide, quartz, polymers for MEMS, conductive polymers. Photolithography, photo resist applications, light sources in implantation, diffusion process oxidation – thermal oxidation, silicon diode, chemical vapour deposition, sputtering - deposition by epitoxy – etching – bulk and surface machining – LIGA process Micro system packaging – considerations packaging – levels of micro system packaging die level, device level and system level.

Micro-Sensors and Micro-Actuators: Electrostatic sensors – Parallel plate capacitors, Applications, Inter-digitated Finger capacitor, Comb drive devices . Thermal Sensing and Actuation – Thermal expansion, Thermal resistors – Applications. Magnetic Actuators – Micromagnetic components.

Case studies of MEMS in magnetic actuators: Piezoresistive sensors – Piezoresistive sensor materials, Stress analysis of mechanical elements, Applications to Inertia, Pressure, Tactile and Flow sensors. Piezoelectric sensors and actuators piezoelectric materials, Applications to Inertia, Acoustic, Tactile and Flow sensors. Microactuator examples, microvalves, micropumps, micromotors Microactuator systems: Ink-Jet printer heads, Micro-mirror TV Projector.

Bio-MEMS: Introduction to BioMEMS, Introduction to Cell Electrophysiology, SiliconMicrofabrication, Microfluidics and BioMEMS applications. MEMS for Drug delivery.

Communication standard: IEEE P1451 standard WG

Course Outcomes: After the completion of this course the student will be able to:

• have an introductory knowledge of Nanotechnology and MEMS, MEMS design and fabrication technology, Lithography, Etching, MEMS material

• understand MEMS types and their applications

• study Magnetic MEMS and introduction to Bio-MEMS

Recommended Books

1. Gardner, J. W., Microsensors, Principles and Applications, John Wiley (2008).

2. Gregory T. Korvacs, Micromachined Transducer sourcebook, McGraw Hill (1998).

3. Turner, A.P.F., and Wilson, G.S., Biosensors?Fundamentals and applications, Oxford University Press (2005).

4. William T., Micromechanics and MEMS, IEEE Press (1997).

5. Tai – Ran Hsu, MEMS and Microsystems Design and Manufacture, Tata-McGraw
   Hill, New Delhi, 2002.