PEI212 MICRO-SENSORS

 

 

L

T

P

Cr

 

3

1

0

3.5

Prerequisite(s): None

MEMS Technology:   Introduction Nanotechnology and MEMS, MEMS design and fabrication technology, Lithography, Etching, MEMS material, Bulk micromachining, Surface micromachining, Micro-actuator, Electrostatic actuation , Micro-fluidics.

 

MEMS types and their applications : Mechanical MEMS: Strain and pressure sensors, Accelerometers etc., Electromagnetic MEMS Micromotors, Wireless and GPS MEMS etc.

 

Magnetic MEMS:  Hall effect sensors, SQUID magnetometers, Optical MEMS:  Micromachined fiber optic component, Optical sensors, Thermal MEMS: Thermo-mechanical and thermo-electrical actuators, Peltier heat pumps.

 

Bio-MEMS: Introduction to BioMEMS, Introduction to Cell Electrophysiology, Silicon Microfabrication, Microfluidics and BioMEMS applications. MEMS for Drug delivery.

 

 

Recommended Books

  1. Gardner, J. W., Microsensors, Principles and Applications, John Wiley (2008).
  2. Gregory T. Korvacs,  Micromachined Transducer sourcebook, McGraw Hill (1998).
  3. Turner, A.P.F., and Wilson, G.S., Biosensors-Fundamentals and applications, Oxford University Press (2005).
  4. William T., Micromechanics and MEMS, IEEE Press (1997).